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Obtaining Au thin films in atmosphere of reactive nitrogen through magnetron sputtering

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Date
2016
Author
Quintero J.H.
Ospina R.
Mello A.
Universidad de Medellín, Medellín, Colombia
Centro Brasileiro de Pesquisas Físicas (CBPF), Rio de Janeiro, Brazil

Citación

       
TY - GEN T1 - Obtaining Au thin films in atmosphere of reactive nitrogen through magnetron sputtering AU - Quintero J.H. AU - Ospina R. AU - Mello A. Y1 - 2016 UR - http://hdl.handle.net/11407/2482 PB - Institute of Physics Publishing AB - ER - @misc{11407_2482, author = {Quintero J.H. and Ospina R. and Mello A.}, title = {Obtaining Au thin films in atmosphere of reactive nitrogen through magnetron sputtering}, year = {2016}, abstract = {}, url = {http://hdl.handle.net/11407/2482} }RT Generic T1 Obtaining Au thin films in atmosphere of reactive nitrogen through magnetron sputtering A1 Quintero J.H. A1 Ospina R. A1 Mello A. YR 2016 LK http://hdl.handle.net/11407/2482 PB Institute of Physics Publishing AB OL Spanish (121)
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Abstract
4d and 5d series of the transition metals are used to the obtaining nitrides metallic, due to the synthesis of PtN, AgN and AuN in the last years. Different nitrides are obtained in the Plasma Assisted Physics Vapour Deposition system, due to its ionization energy which is necessary for their formation. In this paper a Magnetron Sputtering system was used to obtain Au thin films on Si wafers in Nitrogen atmosphere. The substrate temperature was varied between 500 to 950°C. The samples obtained at high temperatures (>500°C) show Au, Si and N elements, as it is corroborated in the narrow spectrum obtained for X-Ray Photoelectron Spectroscopy; besides the competition of orientation crystallographic texture between (111) and (311) directions was present in the X-Ray Diffraction analysis to the sample heated at 950°C.
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http://hdl.handle.net/11407/2482
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